产品特征:晶圆级别量产;;X和Y方向 周期精度 <0.3μm,无累计误差;125、250 微米直径的单模、多模和保偏光纤兼容
产品应用:集成光学器件尾纤、平面波导器件连接、有源器件光纤阵列连接、器件和小型化光器件连接、DWDM和多通道器件构建。
Item | Value | Precision tolerance |
Material | Silicon | - |
Fiber Core diameter | 40um, 80um, 127um | - |
Channel numer | 12CH, 16CH, 20CH, 32CH, 48CH, 64CH, 96CH, 128CH, 154CH | ±0.3um |
Channel Pitch | 127um, 250um, 500um | ±0.3um |
Other dimensions and tolerances can be produced according to customer requirements. |